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Plasma Emission Monitoring

Best way to monitor vacuum process

Technology

Our plasma spectrum measurement technology provides complete control over plasma deposition. Obtaining the full particle composition in real-time allows not only monitoring but also active process management. This makes it possible to detect even minimal changes in the technological environment, leading to reduced defects, optimized material consumption, and increased production stability.

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Hardware

Our hardware is the cornerstone of precise measurements. We utilize high-quality vacuum components, meticulously selected and tested to ensure stable and reliable operation in the most demanding conditions. Their versatility allows our solutions to be integrated into both research setups and industrial production lines. This guarantees you a durable and effective tool for achieving your technological goals.

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Software

Our intelligent software identifies dynamic process conditions, enabling the system to autonomously recognize key events. Its functionality includes high-precision end-point detection and automatic recognition of leakage conditions. This ensures enhanced process control accuracy and optimized production parameters.

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Plasma Tune

Plasma Monitoring Application: Provides precise control and real-time optimization of plasma deposition processes.

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Hardware platform

A modular platform featuring modern components designed to house our boards, ensuring high system stability and versatility across various configurations.

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Measurement devices

High-precision monochromators, spectrometers, and spectrographs, specifically adapted for controlling optical deposition processes.

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Specification

Parameter Value
Spectral Channel 1-16
Wavelength Range 200 - 1100 [nm]
Spectral Resolution 0.5-0.7 [nm]
Signal Resolution 16 [bit]
Parameter Value
Digital I/O Min. 8/8
Digital I/O Max. 128/128
Digital I/O Voltage 24 [V]
Parameter Value
Count Min./Max 2/64
Voltage Mode Unipolar, Bipolar
Resolution 16-bit*
Unipolar Voltage 10 [V], 5 [V]
Bipolar Voltage ±10 [V], ±5 [V]
Input Impedance 1 [MΩ]
Parameter Value
Count Min./Max 2/64
Out Type Voltage, Current
Resolution 16-bit*
Voltage Mode Unipolar, Bipolar
Unipolar Voltage 10 [V], 5 [V]
Bipolar Voltage ±10 [V], ±5 [V]