Plasma Emission Monitoring

Optical Emission Spectroscopy is a highly advanced and effective tool for plasma analysis, providing detailed information on elemental composition.

We are experts in creating products that monitor plasma, using advanced instruments and techniques to guarantee precise analysis and control of plasma processes.

Plasma Monitoring Components

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PlasmaTune

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Hardware Platform

Insoptics software supports monochromators, spectrometers, and spectrographs. Such an approach can implement any monitoring strategy according to any required coating.

Detectors

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Discover Our Amazing Features

Unlock the full potential of your processes

Intelligence

PEM is designed to automatically identify spectral lines from various elements and molecules in plasma. Additionally, it features a unique diagram designer that enables the creation of feedback loops using intensity data from these lines or analog inputs. The built-in diagrams offer a range of mathematical functions that can easily transform data into monitoring trends.

Performance

All-on-one design helps to save time during installation. The main unit has all the required interfaces to integrate into plasma process equipment. A variety of high-speed IOs can be plug in seconds using high-quality connectors.

Hardware

High precision optics minimize intensity losses and increase data rates to make ultimately reliable control. Optional vacuum collimators prevent optical surface contamination during the plasma processes.

Flexibility

You can customize Insoptics PEM to make a multi-point measurement from a single vacuum chamber or it can be installed on multiple chambers and receive data from different points independently. Optimized spectrometer poll allows simultaneously receive data from 16 spectrometers at the same time in the range from 200-1100 nm.

Specification

Learn more about capabilities of our OES product

Parameter Value
Spectral Channel 1-16
Wavelength Range 200 - 1100 [nm]
Spectral Resolution 0.5-0.7 [nm]
Signal Resolution 16 [bit]
Parameter Value
Digital I/O Min. 8/8
Digital I/O Max. 128/128
Digital I/O Voltage 24 [V]
Parameter Value
Count Min./Max 2/64
Voltage Mode Unipolar, Bipolar
Resolution 16-bit*
Unipolar Voltage 10 [V], 5 [V]
Bipolar Voltage ±10 [V], ±5 [V]
Input Impedance 1 [MΩ]

*18-bit by request

Parameter Value
Count Min./Max 2/64
Out Type Voltage, Current
Resolution 16-bit*
Voltage Mode Unipolar, Bipolar
Unipolar Voltage 10 [V], 5 [V]
Bipolar Voltage ±10 [V], ±5 [V]
Current Mode 4-20 [mA], 0-20 [mA], 0-24 [mA]

*18-bit by request